Novel Design and Signal Transduction Concepts of Micromachined Flow Sensors
نویسندگان
چکیده
In this work we investigate a novel design approach and signal transduction concepts for micromachined calorimetric flow sensors. Maintaining a constant average excess temperature of the membrane by means of a simple two-state electronic controller, a pulse modulated actuation signal is obtained. The sensitivity of the output signal can be influenced by altering the amplitude of the heating pulse. The proposed novel sensor design offers three different operating modes. Beside the conventional calorimetric transduction, such sensors are also operable in a mixed calorimetricanemometric mode featuring low power consumption, high flow sensitivity, and an unambiguous transduction characteristic over a wide flow range.
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